2-D Analytical Solution of Film Planarization for Spin Coating
碩士 === 國立中央大學 === 機械工程研究所 === 94 === This thesis is the first one to present “a 2-D analytical solution of film planarization for spin coating”. This analytical solution is used for predicting the degree of planarization (abbreviated as DOP), and describing the film distribution. Among semiconductor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z4e8yt |