Research of the morphology and deposition region of Cu microstructure by micro-anode guided electroplating (MAGE)
碩士 === 國立中央大學 === 機械工程研究所 === 94 === Micro-anode guided electroplating(MAGE) method was investigated to deposit Cu micrometer column in 0.8M sulfate bath using single-step、stepping and constant period electroplating . The effect of electrical bias、inter-electrode gap , on the coverage area, morpholo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77808547357405098238 |