The study of microwave activation on hydrogen ions implanted with silicon
碩士 === 國立中央大學 === 機械工程研究所 === 94 === The development in Silicon-on-Insulator（SOI）materials and dissimilar materials layer transfer process have led the thin film semiconductor technology into a new era. Smart-cut process is a layer transfer process which combines three main steps: ion implantation,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02366057553934510527 |