Studies of Pulsed DC Reactive Magnetron Sputtering of AlN Thin Films
碩士 === 國立東華大學 === 材料科學與工程學系 === 94 === The crystal orientation of deposited AlN film is important since the piezoelectric properties of this film are strongly related to its orientation. The aim of this thesis is to deposit highly textured (002) AlN film on (100) Si substrate using pulsed DC reactiv...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09535441567668818923 |