Some mechanical and optical properties of sputtered TiO films
碩士 === 國立高雄海洋科技大學 === 輪機工程研究所 === 93 === Abstract Nanoindentation is now the most commonly used method for studying mechanical properties of materials on the nanoscale. It can also be applied to the study of the mechanical properties of TiO (Titanium oxide) films. Among the several crystal struct...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/40592898010776518440 |