Some mechanical and optical properties of sputtered TiO films

碩士 === 國立高雄海洋科技大學 === 輪機工程研究所 === 93 === Abstract Nanoindentation is now the most commonly used method for studying mechanical properties of materials on the nanoscale. It can also be applied to the study of the mechanical properties of TiO (Titanium oxide) films. Among the several crystal struct...

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Bibliographic Details
Main Authors: Chien-Hung Chen, 陳建宏
Other Authors: Kee-Rong Wu
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/40592898010776518440