A Study on process parameters and properties of deposited Cr and Alcontaining diamond-like carbon film by unbalanced magnetron sputtering
博士 === 國立高雄第一科技大學 === 工程科技研究所 === 94 === Abstract In this study, the high-speed steels were used as the substrates for sputtering. Cr and Al containing diamond-like carbon films deposited by unbalanced magnetron sputtering to improve the adhesion of diamond-like carbon film as well as high-precision...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/29918123354577315773 |