A Study on process parameters and properties of deposited Cr and Alcontaining diamond-like carbon film by unbalanced magnetron sputtering
博士 === 國立高雄第一科技大學 === 工程科技研究所 === 94 === Abstract In this study, the high-speed steels were used as the substrates for sputtering. Cr and Al containing diamond-like carbon films deposited by unbalanced magnetron sputtering to improve the adhesion of diamond-like carbon film as well as high-precision...
Main Authors: | Guo-Wei Li, 李國維 |
---|---|
Other Authors: | Tsow-Chang Fu |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/29918123354577315773 |
Similar Items
-
Synthesis and Characterization of Metal-Containing and Hydrogenated Diamond-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering Process
by: Chi-Lung Chang, et al.
Published: (2001) -
Deposition and Characterization of Diamond-like Carbon Films by Electron Cyclotron Resonance Microwave Plasma Enhanced Unbalanced Magnetron Sputtering
by: Xin Li, et al.
Published: (2018-07-01) -
Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films
by: Jen-Fung Chang, et al.
Published: (2002) -
The study of mechanical properties of zirconium embedded diamond-like carbon coatings by unbalanced magnetron sputtering
by: Shih-Hong Wang, et al.
Published: (2009) -
Deposition of Diamond-like Carbon Films on SKD11 by R.F. Magnetron Sputtering
by: CHANG CHING YU, et al.
Published: (2002)