To fabricate surface acoustic wave transducers with sub-wavelength features by using near-field phase-shifting contact lithography
碩士 === 國立高雄第一科技大學 === 光電工程研究所 === 94 === ABSTRCT This paper describes two major topics. One is the studies and researches of the most recent developments about resolution-enhancing techniques in the optical lithography of the semiconductor industry. The other is that can be employed the method of ne...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52603142230503048307 |