Time-resolved optical beam induced current mapping of photonic device
碩士 === 國立中山大學 === 光電工程研究所 === 94 === Optical beam induced current mapping has found wide-spread applications in charactering semiconductor devices and integrated circuitry. Conventionally a focused cw laser beam is employed to excite carriers in the depletion region that is subsequently detected to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37376345801479756332 |