The Study and Fabrication of 2D Photonic Crystal Microcavity and LC-DFB laser
碩士 === 國立中山大學 === 光電工程研究所 === 94 === In this thesis, we fabricated the 2D photonic crystal microcavity and laterally coupled distributed feedback laser on InGaAs/InAlGaAs wafers by E-beam lithography. We also fabricated the 2D photonic crystal microcavity on the InGaAs/GaAs substrate at 980nm emissi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88976695564899650888 |