The Study of ZnO Piezoelectric Thin Film Prepared by Two-Step Sputtering for FBAR Application
碩士 === 國立中山大學 === 電機工程學系研究所 === 94 === In this study, a two-step deposition method using RF reactive magnetron sputtering is proposed to obtain high quality Piezoelectric ZnO thin films for film bulk acoustic resonators (FBARs). The titanium (Ti) seeding layer and platinum (Pt) bottom electrode were...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73708497913261045430 |