Design and Fabrication of Gapless Triangular Micro-lens Arrays
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 94 === This study presents a new process to fabricate gapless triangular micro-lens array (GTMA). The process includes optical simulation with tracepro, UV lithography, photoresist reflow process, Ni electroplating and hot embossing technique. After photoresist tri...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/50775444712025394899 |