Fabrication and thermoelectric characterization of sputtered Bi/Te multilayer thin films
碩士 === 國立清華大學 === 材料科學工程學系 === 94 === In this study, the Bi/Te multilayer thin films were deposited on SiO2/Si substrate by magnetron sputter deposition method, and transformed into Bi-Te compound by thermal treatment. Effect of relative Bi/Te composite on the thermoelectric properties of annealed B...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/10978011343164988518 |