Study of the Metallic Pattern Formation by means of Direction Nanoimprint
碩士 === 國立清華大學 === 動力機械工程學系 === 94 === The thesis proposes an alternative method which can transfers nano-scale patterns to aluminum (Al) thin films directly. If the template can perfectly reproduce on metallic thin films, then it is called high fidelity patterns and the best quality of nanoimprint....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/48849592381752812226 |