Design and Analysis of glass plate Type Lateral Shearing Interferometer
碩士 === 國立清華大學 === 動力機械工程學系 === 94 === Due to the rapid growth of optics industry in Taiwan recently, the precision inspection technology for optical elements has gradually shown its importance as well. Because the technology must rely on high resolution and non-contact features embedded in fraction...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36450274147086779907 |