| Summary: | 碩士 === 國立清華大學 === 動力機械工程學系 === 94 === This study presents the design and fabrication of a single layer step-bridge out-of-plane actuator. It can solve the delamination problem of traditional bi-morph electrothemal actuators. The step-bridge actuator consists of a clamped-clamped beam with two step-structures. Thus, the actuator will be bent as well as buckled in the out-of-plane direction by Joule heating. Moreover, the moving direction of the actuator is determined by the step-structure.
The output displacement can be changed by varying the length d for a given beam length L. It demonstrates that the actuator moved upward with amplitude near 13.2 um when driven at 54 mW. The characteristic of the dynamic response has two peaks at 46 Hz and 86.5 kHz. The first peak is due to thermal behavior and the second peak is resulted from resonance of the structure. Furthermore, by using the design of the step-structure can control disappearance of even or odd structure mode, which can be apply to more applications. Finally, we utilized the actuator in micro scanner and micro position stage applications.
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