Analysis of microcrystalline silicon and fabrication of thin film solar cell by ECRCVD
碩士 === 國立清華大學 === 電子工程研究所 === 94 === In this thesis, we do analysis of boron and phosphorus doped microcrystalline silicon and undoped microcrystalline silicon thin films deposited on glass and 4` wafer substrates by electron cyclotron resonance chemical vapor deposition (ECRCVD). Meanwhile, by usin...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13685904642986295119 |