Analysis of silicon thin film and fabrication of heterostructure thin film solar cell
碩士 === 國立清華大學 === 電子工程研究所 === 94 === Research work, we grew the silicon thin films with different hydrogen dilution ratio by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The crystalline fraction, bonding configurations, crystalline orientation and grain size, film thickness, da...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72892260978873909348 |