Effect of Oxygen Flow Rate on the Structure and Properties of Nanocrystalline Zr(N,O) Thin Film
碩士 === 國立清華大學 === 工程與系統科學系 === 94 === This research studied the effect of oxygen flow rate on the composition, microstructure and properties of Zr(N,O) thin films deposited on AISI 304 stainless steel substrate using hollow cathode discharge ion-plating (HCD-IP) method. The Zr:N:O ratios of the Zr(N...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27776893949996187599 |