Oxygen Doping on the Structure and Properties of Nanocrystalline Ti(N,O) Thin Film
碩士 === 國立清華大學 === 工程與系統科學系 === 94 === Nano-crystalline Ti(N,O) films were successfully deposited on AISI 304 stainless steel substrates using unbalanced magnetron sputtering (UBM) system with addition of oxygen and nitrogen at 350℃. The effect of oxygen flow rate was investigated on the composition,...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/45059247410667622827 |