Oxygen Doping on the Structure and Properties of Nanocrystalline Ti(N,O) Thin Film

Oxygen Doping on the Structure and Properties of Nanocrystalline Ti(N,O) Thin Film

碩士 === 國立清華大學 === 工程與系統科學系 === 94 === Nano-crystalline Ti(N,O) films were successfully deposited on AISI 304 stainless steel substrates using unbalanced magnetron sputtering (UBM) system with addition of oxygen and nitrogen at 350℃. The effect of oxygen flow rate was investigated on the composition,...

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Bibliographic Details
Main Authors:	Shang-Jui Chiu, 邱上睿
Other Authors:	Ge-Ping Yu
Format:	Others
Language:	en_US
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/45059247410667622827

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