A performance study and fabrication of pin-poly-Si1-xGex films for photodetecting and solar-cell
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 94 === In this thesis, poly-Si1-xGex layers with x≦0.2 were epitaxially grown on a 4 inch (100) substrate by means of low pressure chemical vapor deposition (LPCVD) at 620℃ temperature. From our experiment results, we found that the annealed processes improved the char...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19784403087728769379 |