Scanning probe lithography and electrostatic force microscopy study on chromium film and chromium oxide
碩士 === 國立臺灣大學 === 物理研究所 === 94 === Scanning probe microscope has been extensively used to perform nanometer and atomic-scale modifications on a great variety of surface. The advantages of scanning probe lithography technique are its high resolution, excellent alignment accuracy, high reliability, an...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18213548185738453014 |