The Electric Characteristic and Measurement of Silicon Nanowire Field Effect Transistor
碩士 === 國立臺灣大學 === 電子工程學研究所 === 94 === The silicon nanowires (SiNWs) with Au nanoparticles as catalyst are grown via vapor-liquid-solid (VLS) mechanism by low pressure chemical vapor deposition (LPCVD). The density of Au nanoparticles as catalyst on the substrate can be controlled by the Au depositio...
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| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83837875231915206327 |