Fabrication and Analysis of Poly-Si Thin Film Transistor and Si Nanowire Field Effect Transistor
博士 === 國立臺灣大學 === 電機工程學研究所 === 94 === The fabrication and analysis of poly-Si thin film transistor (TFTs) and Si nanowires (SiNWs) field effect transistor were studied in this thesis. The poly-Si with regular and large grain was fabricated by employing metallic pads as the heat sinks and with underl...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91299119763967689187 |