Design and Development of a Micro Deformation Measurement System integrated with Atomic Force Microscopic and Optical Principles and Performance Analyses
碩士 === 國立臺灣大學 === 機械工程學研究所 === 94 === The aim of this thesis is to design and develop a micro deformation and displacement measurement system that is integrated with the laser measurement function of the DVD pickup head and the scanning measurement function of the atomic force microscope (AFM) probe...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41816548867480525702 |