Study on surface morphology of excimer laser micromachined glasses and its application in fabricating micro-tip array
博士 === 國立臺灣大學 === 機械工程學研究所 === 94 === Glass materials, which have been widely employed in MEMS, semi-conductor, optical communications and bio-medical technology, are superb for its high transparency, high rigidity and high chemical stability. However, the brittleness of glass materials makes them e...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10278355436118797080 |