SPM Technology for Machining Tree-Dimensional Nano Patterns
碩士 === 國立臺灣大學 === 機械工程學研究所 === 94 === This thesis addresses the 3-dimensional scanning probe microscope (SPM) lithography. Previous researches have shown that servo control imposes significant effect on the behavior of the piezo-electric actuators used in the SPM system; however, there is very littl...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88218108568555732317 |