The study for dimensional measurement of microholes
碩士 === 國立臺灣大學 === 機械工程學研究所 === 94 === A system for measuring the profile of a microhole is developed. The principle of capacitance is adopted and a device to sense the variation of capacitance when the probe touches the workpiece is designed. With the aid of the rotation stage, positions around the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90259297358402544554 |