Synthesis Low-k Films by PECVD Technique Using γ-GPS and C7F8 as the Precursors
碩士 === 國立臺灣科技大學 === 化學工程系 === 94 === Low-k films with a dielectric constant of about 2.5 have been successfully synthesized using octafluoroluene(C7F8) and γ-glycidoxypropyl-trimethoxysilane(γ-GPS) as the precursors in a parallel plate PECVD system at 6 W and 100℃ .It is formed that when C7F8/γ-GPS...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26qcb3 |