Dynamic Modeling and Control of Atomic Force Microscope probe measurement system
碩士 === 國立臺灣科技大學 === 高分子系 === 94 === The objective of thesis is to derive the mathematical model and design the controller of the micro-cantilever probe measurement system of atomic force microscopy. However, most of the distributed parameter control system for atomic force microscopy are based on re...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xc355v |