Fabrication of Carbon-nitride Thin-Film by ECR-CVD for Optoelectronic Device Applications
碩士 === 南台科技大學 === 電機工程系 === 94 === Carbon-nitride is an interesting and important material owing to its several superior properties including high bulk modulus, high hardness, high decomposition temperature, high strength, high thermal conductivity and excellent resistance to corrosion and wear. How...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68156078062746141474 |