Characteristics of amorphous carbon films produced by electron cyclotron resonance chemical vapor deposition
碩士 === 南台科技大學 === 機械工程系 === 94 === Amorphous carbon films (a-C) is the material which use commonly has much excellent property, such as high chemistry resistance, high hardness, isolation, fine heat conduction, high infrared wave transparency, high biological compatibility and wear resistance. Due t...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/12876967964974277666 |