The Investigations of Humidification and Removal Efficiency for Gas Contamination by Air-washer in Make-up Air Unit

• Main Authors: Yi -Long Chang, 張義龍
• Other Authors: Shih-Cheng Hu
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/6ebf7f

碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === The micro-contamination has been shifted to Airborne Molecular Contaminants (AMCs) caused by smaller pitch of wafer manufacturing process requested by semi-conductor industries. The AMCs generated in the clean room can be removed by chemical filter installed on FFUs. However, for outdoor make-up air, chemical filter installed on make-up air unit (MAUs) cause high capital and operation cost. An-easy-to-get, cheap and effective water applied on humidifier will become a good gas-absorb working fluid. Making the air-washer as a humidifier with scrubber-like performance is the most urgent work for AMC abatement. In this research, we will establish research capability for air-washer humidifier prototype with variable component due for determining relative variation of AMC removing efficiency with the hydrophilic eliminator, liquid/gas ratio, and arrangement of water nozzle.