Benchmark of Electronic Industry-- Wafer Plants、Panel Plants
碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === The operating environment of the process required by electronic industry should be conducted in air-conditioned Clean Room. The air-conditioned system of Clean Room imposes great impact to the design, process, and acceptance rate of product and reliability of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z68z4c |