Airflow Simulation of Semiconductor Clean Room and Energy Saving Operation Strategy
碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === In the present study, air flow fields and pressure distributions of a full scale class 100 semiconductor clean room system were simulated using a computational fluid dynamics (CFD) model that incorporates flow resistances of various components in the air path....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/kd826b |