Epitaxial InN film using Hydrazoic acid:in-situ study of growth and ex-situ optical characterization
碩士 === 大同大學 === 光電工程研究所 === 94 === Epitaxial InN thin film has been successfully grown along (0001) direction with wurtzite structure on c-plane GaN template using hydrazoic acid as nitrogen source by gas-source molecular beam epitaxy. Residual gas analyzer (RGA) result shows that HN3 exhibits highl...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/38052377675094267744 |