Epitaxial InN film using Hydrazoic acid:in-situ study of growth and ex-situ optical characterization

碩士 === 大同大學 === 光電工程研究所 === 94 === Epitaxial InN thin film has been successfully grown along (0001) direction with wurtzite structure on c-plane GaN template using hydrazoic acid as nitrogen source by gas-source molecular beam epitaxy. Residual gas analyzer (RGA) result shows that HN3 exhibits highl...

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Bibliographic Details
Main Authors: Jr-tai Chen, 陳志泰
Other Authors: Kuei-hsien Chen
Format: Others
Language:en_US
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/38052377675094267744