Deposition of highly c-axis oriented LiNbO3 thin films on SiO2/Si substrates with a ZnO buffer layer by pulsed laser deposition for surface acoustic wave application
碩士 === 大同大學 === 光電工程研究所 === 94 === In general, it is very difficult to deposit highly orientated LiNbO3 thin films on Si substrates since the lattice mismatch between them. In this study, ZnO film was introduced as the buffer layer between the LiNbO3 thin film and the Si substrate to avoid the above...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/20099714695315062423 |