Plasma CVD-deposited Semiconductive Thin Films and Their Application of Chemical Sensors
博士 === 大同大學 === 材料工程學系(所) === 94 === In this study, the design of the sensitive device is employed to improve the sensitive effects by varying the construction, pattern, size, width, and inter-distance of the electrode. The purpose is to increase the effective width and reduce the inter-distance of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13558738177877159090 |