Studies of Atomic Force Microscopy Tip-Induced Anodic Oxidation Applications
碩士 === 吳鳳技術學院 === 光機電暨材料研究所 === 94 === The behavior of oxide grown by the Atomic Force Microscope (AFM) probe on silicon wafer is studied in view of electrochemical reaction in this thesis. In this study, we take the effects of space charge on the oxidation behavior into considerations. By means of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39023060486753292016 |