Precision Tracking Control of a Five-Degrees-of-Freedom Piezoelectric-Actuated Stage
碩士 === 國立雲林科技大學 === 電機工程系碩士班 === 94 === In this paper, precision tracking control of Five-Degrees-of-Freedom piezoelectric-actuated systems is discussed. Generally, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. In order to obtain precision tracking con...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/78143261518707292217 |