The Study on the Sputter-deposited Lithium Manganese Oxide as Cathode Materials for Thin Film Lithium Batteries
碩士 === 國立雲林科技大學 === 工業化學與災害防治研究所 === 94 === In our study, cathodic lithium manganese oxide film with spinel structure was deposited by radio frequency magnetron sputtering. The sputtering energy and the annealing temperature can control the size of grain clustering effectively. Thus, sputtering ener...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/85876490911003226407 |