Implementation of the Prognostic Expert System in Predictive Maintenance of a Semiconductor Plant Ultra-pure Water System
碩士 === 國防大學中正理工學院 === 資訊科學研究所 === 95 === This research aims to explore the application of Prognostic Expert System in predictive maintenance for semiconductor Ultra-Pure Water System. This research has developed a Prognostic Expert System to predict and schedule the maintenance planning. Furthermor...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35681100440389638222 |