Digital Holography Microscopy (DHM) forthree dimension microstructure measurement
碩士 === 國立中正大學 === 機械工程所 === 95 === Three-dimensional micro-feature inspection is a critical issue of semiconductor and optoelectronic industry. The most important characteristics of optical metrology using the interferometer technique are the “non-contact” and “high-resolution”. “High-speed” is an...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53546560125441955670 |