Characteristics of ZnO films grown on GaN templates
碩士 === 國立中正大學 === 光機電整合工程所 === 95 === In this study, ZnO films were deposited on GaN / (0001) sapphire substrates by atomic layer deposition (ALD). Under certain experimental conditions, high optical quality ZnO films were achieved. ZnO films were grown using diethylzinc (DEZn) and high purity nit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91895610402985772187 |