A Study on Direct Writing of PS-b-PMMA Block Copolymer Using Dip-pen Nanolithography
碩士 === 國立中正大學 === 光機電整合工程所 === 95 === Block copolymer(BCP) can self assemble into micro phase separation, so BCP is researched popularly. The general fabrication is spin coating, but this method can’t make BCP patterning. We use Dip-pen Nanofabrication to make BCP patterning on the substrate. In the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77330573540174862379 |