Effect of Titanium Content on the Physical and Electrical Properties of Erbium Oxide and Neodymium Oxide Gate Dielectrics
碩士 === 長庚大學 === 電子工程研究所 === 95 === In this thesis, we reported on structural and electrical characteristic of high-k erbium titanium oxide (Er2TiO5) and neodymium titanium oxide (NdTiO3) as the metal-oxide-semiconductor capacitance gate dielectrics by reactive RF sputtering. Effect of titanium conte...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96074520119001386452 |