Investigation of Reactive-Ion Etching (RIE) Technique for GaN Epitaxial Materials
碩士 === 長庚大學 === 電子工程研究所 === 95 === Abstract GaN crystal has become one of the most remarkable photonic materials in the last decade. Blue luminescence of GaN devices makes full-color display into reality. Most importantly, its near-ultraviolet emitting attribute has greatly increased the storage ca...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24976178067356908553 |