Design and Fabrication of A Linearly Optical Scanning Mirror for Optical Coherence Tomography
碩士 === 中華技術學院 === 機電光工程研究所碩士班 === 95 === This research focuses on excimer laser manufacturing technique, which is based on MEMS. Therefore, this technique also applies OCT (Optical Coherence Tomography). To fabricate an electromagnetic micro scanning mirror driven by single chip 8051 to act a vertic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25635203378935378642 |