Characterizations of whitely luminescent silicon-rich nitride films fabricated by atmospheric pressure chemical vapor deposition
碩士 === 中原大學 === 電子工程研究所 === 95 === Silicon-rich nitride (SRN) films that could present an intense white-light emission were fabricated by atmospheric pressure chemical vapor deposition. The SRN films were deposited on Si substrates using gaseous SiH2Cl2 (DCS) and NH3 as the source materials for Si a...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78378493746427034737 |